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F-Theta lenses made for laser material processing
Powerful and robust lenses for the high demands of your laser beam guidance system
Jenoptik F-Theta objective lenses
Extremely robust
Low-contaminating mounting technologies, no adhesives and lubricants, clean room assembly
Precise
Thanks to high-performance optical design
Flexible
Quickly and easily integrate components into any existing system
Customer specific
Available as a standardized solution or can be adapted to your individual requirements
Efficient
FEM analyses of optical assemblies monitor thermal and mechanical stress to save money
Series stability
Extensive testing ensures interchangeability in the field
F-Theta JENar® lenses for wavelengths from 355 to 1080 nm
The F-Theta JENar® lenses are suitable for uses in micromaterial processing, especially for microstructuring or for marking and labeling different materials.
The JENar® series is used for laser wavelengths in the UV, VIS or IR range, but they are also available for wavelengths from 355 to 1080 nm. The standard lenses are produced with protective glass and are extremely durable.
These lenses can be quickly and easily integrated into any system using the available STEP files. Each lens undergoes a standardized application-specific test, which ensures consistency of the optical properties during series production. This makes it easy to replace lenses, and customer benefit from an increased product lifecycle.
| Lens | Order number | Wave length | Data sheet | Step data | Zemax data | Back reflections |
|---|---|---|---|---|---|---|
| JENar®102-515...540-75 | 017700-202-26 | 515...540 nm | DB*-202-26 | STP*-202-26 | ZIP*-202-26 | PDF*-202-26 |
| JENar®108-515...540-75 | 017700-203-26 | 515...540 nm | DB*-203-26 | STP*-203-26 | ZIP*-203-26 | PDF*-203-26 |
| JENar®100-515...540-90 | 017700-209-26 | 515...540 nm | DB*-209-26 | STP*-209-26 | ZIP*-209-26 | PDF*-209-26 |
| JENar®170-515...540-160 | 017700-206-26 | 515...540 nm | DB*-206-26 | STP*-206-26 | ZIP*-206-26 | PDF*-206-26 |
| JENar®255-515...540-233 | 017700-205-26 | 515...540 nm | DB*-205-26 | STP*-205-26 | ZIP*-205-26 | PDF*-205-26 |
| JENar®330-515...540-347 | 017700-208-26 | 515...540 nm | DB*-208-26 | STP*-208-26 | ZIP*-208-26 | PDF*-208-26 |
| JENar®420-515...540-420 | 017700-207-26 | 515...540 nm | DB*-207-26 | STP*-207-26 | ZIP*-207-26 | PDF*-207-26 |
| JENar®100-1030...1080-93 | 017700-024-26 | 1030...1080 nm | DB*-024-26 | STP*-024-26 | ZIP*-024-26 | PDF*-024-26 |
| JENar®125-1030...1080-80 | 017700-003-26 | 1030...1080 nm | DB*-003-26 | STP*-003-26 | ZIP*-003-26 | PDF*-003-26 |
| JENar®125-1030...1080-80 + VIS1) | 601926 | 1030...1080 nm | DB 601926 | STP 601926 | ZIP 601926 | PDF 601926 |
| JENar®160-1030...1080-170 | 017700-019-26 | 1030...1080 nm | DB*-019-26 | STP*-019-26 | ZIP*-019-26 | PDF*-019-26 |
| JENar®160-1030...1080-170 + VIS1) | 601914 | 1030...1080 nm | DB 601914 | STP 601914 | ZIP 601914 | PDF 601914 |
| JENar®170-1030...1080-170 | 017700-018-26 | 1030...1080 nm | DB*-018-26 | STP*-018-26 | ZIP*-018-26 | PDF*-018-26 |
| JENar®255-1030...1080-239 | 017700-017-26 | 1030...1080 nm | DB*-017-26 | STP*-017-26 | ZIP*-017-26 | PDF*-017-26 |
| JENar®255-1030...1080-239 + VIS1) | 601948 | 1030...1080 nm | DB 601948 | STP 601948 | ZIP 601948 | PDF 601948 |
| JENar®350-1030...1080-452 | 017700-009-26 | 1030...1080 nm | DB*-009-26 | STP*-009-26 | ZIP*-009-26 | PDF*-009-26 |
| JENar®347-1030...1080-354 | 017700-022-26 | 1030...1080 nm | DB*-022-26 | STP*-022-26 | ZIP*-022-26 | PDF*-022-26 |
| JENar®347-1030...1080-355 | 609661 | 1030...1080 nm | DB* 609661 | STP* 609661 | ZIP* 609661 | PDF 609661 |
| JENar®420-1030...1080-420 | 017700-021-26 | 1030...1080 nm | DB*-021-26 | STP*-021-26 | ZIP*-021-26 | PDF*-021-26 |
Optimized for micromaterial processing
High-power F-Theta JENar™ APTAline™ objective lenses
F-Theta JENar® APTAline® objective lenses for wavelengths from 355 nm to 1080 nm
With the new JENar® APTAline® series, we offer lenses that are optimally tailored to customers' requirements. This means that we respond to the constantly changing requirements of the industry and increase the possible range of applications with the APTAline® series.
These quartz glass, high-power lenses offer a cost-optimized alternative for demanding applications where reliability, series stability and durability count. They are available for wavelengths of 1030...1080 nm. The APTAline® lenses are based on proven mechanical and optical designs and are subject to the same high-quality standards as our other F-Theta products.
| Lens | Order number | Wave length | Data sheet | Step data | Zemax data | Back reflections |
|---|---|---|---|---|---|---|
| JENar®APTAline® 160-1030...1080-110-AL | 689620* | 1030...1080 nm | DB 689620 | STP 689620 | ZIP 689620 | PDF 689620 |
| JENar®APTAline® 255-1030...1080-160-AL | 689622* | 1030...1080 nm | DB 689622 | STP 689622 | ZIP 689622 | PDF 689622 |
| JENar®APTAline® 161-1030...1080-71-AL | 679781* | 1030...1080 nm | DB 679781 | STP 679781 | ZIP 679781 | PDF 679781 |
Always with an eye on the market
High-power F-Theta JENar™ Silverline™ objective lenses
F-Theta JENar® Silverline™ objective lenses for wavelengths from 355 to 1080 nm
SilverlineTM F-Theta lenses from Jenoptik have been specially developed for applications that require high-power lasers and short-term pulses. These lenses consist of low-absorbing, full quartz glass to offer particularly high laser power. They are available for wavelengths of 266 nm, 355 nm, 1030...1080 nm or 900...1100 nm.
The SilverlineTM F-Theta lenses limit diffraction and produce a high image quality. They are also highly resistant to damage and provide high spot consistency over the entire scanning range. With beam power of up to four kilowatts, the SilverlineTM lenses do not require active cooling and guarantee a minimal focal point shift for high-power lasers.
Specifically, the SilverlineTM F-Theta lens 170-355-140 covers the 355 nm range. It has a low maximum telecentric angle of only 4.9 degrees and a homogeneous spot size distribution over a working field of 100 x 100 mm. This large working field combined with diffraction-limiting imaging quality enables increased output in comparison to conventional lenses ensured by our innovative, patented mounting technology.
| Lens | Order number | Wave length | Data sheet | Step data | Zemax data | Back reflections |
|---|---|---|---|---|---|---|
| JENar®SilverlineTM 160-1030...1080-110 | 017700-025-26 | 1030...1080 nm | DB-025-26 | STP-025-26 | ZIP-025-26 | PDF-025-26 |
| JENar®SilverlineTM 161-1030...1080-71 - NEW | 660149 | 1030...1080 nm | DB 660149 | STP 660149 | ZIP 660149 | PDF 660149 |
| JENar®SilverlineTM 255-1030...1080-160 | 017700-026-26 | 1030...1080 nm | DB-026-26 | STP-026-26 | ZIP-026-26 | PDF-026-26 |
| JENar®SilverlineTM 423-1030...1080-360 | 609120 | 1030...1080 nm | DB 609120 | STP 609120 | ZIP 609120 | PDF 609120 |
| JENar®SilverlineTM 160-900...1100-1101) | 601787 | 900...1100 nm | DB 601787 | STP 601787 | ZIP 601787 | PDF 601787 |
| JENar®SilverlineTM 255-900...1100-1601) | 601804 | 900...1100 nm | DB 601804 | STP 601804 | ZIP 601804 | PDF 601804 |
| JENar®SilverlineTM 423-900...1100-3601) | 628951 | 900...1100 nm | DB 628951 | STP 628951 | ZIP 628951 | PDF 628951 |
| JENar®SilverlineTM 115-515...540-71 | 624103 | 515...540 nm | DB 624103 | STP 624103 | ZIP 624103 | PDF 624103 |
| JENar®SilverlineTM 163-515...540-92 - NEW | 659612 | 515...540 nm | DB 659612 | STP 659612 | ZIP 659612 | PDF 659612 |
| JENar®SilverlineTM 55-355-21 | 605678 | 355 nm | DB 605678 | STP 605678 | ZIP 605678 | PDF 605678 |
| JENar®SilverlineTM 103-355-71 | 017700-402-26 | 355 nm | DB-402-26 | STP-402-26 | ZIP-402-26 | PDF-402-26 |
| JENar®SilverlineTM 125-355-75 | 628956 | 355 nm | DB 628956 | STP 628956 | ZIP 628956 | PDF 628956 |
| JENar®SilverlineTM 510-355-431 | 017700-405-26 | 355 nm | DB-405-26 | STP-405-26 | ZIP-405-26 | PDF-405-26 |
| JENar®SilverlineTM 255-355-240 | 017700-406-26 | 355 nm | DB-406-26 | STP-406-26 | ZIP-406-26 | PDF-406-26 |
| JENar®SilverlineTM 170-355-140 | 586840 | 355 nm | DB 586840 | STP 586840 | ZIP 586840 | PDF 586840 |
| JENar®SilverlineTM 103-266-71 | 017700-601-26 | 266 nm | DB-601-26 | STP-601-26 | ZIP-601-26 | PDF-601-26 |
Additional information about F-Theta lenses
Basic knowledge about F-Theta lenses
F-Theta objective lenses
F-Theta objectives
Jenoptik‘s F-Theta objectives are optimized for the requirements of laser material processing. They realize even focal planes over the scan area independent from scan angle. On the one hand, they are designed to yield excellent optical performance, manifesting itself in small field curvature, small distortion and diffraction limited focus sizes.
On the other hand, F-Theta lenses realize a linear dependence between the angle Θ of the incoming laser beam and the image height h of the focussed spot on the workpiece. The proportionality factor is the focal length f. This relationship is expressed mathematically as h = f Θ, which gives these special lenses their name F-Theta.
Application relevance
Whereas the merits of good optical performance are easy to see, the advantages of the F-Theta relation are more subtle and best understood considering polygon scanners. Those scanners rotate with a constant angular velocity at very high scan speeds for dynamic processing. If, for example, the image height would be proportional to the tangens of Θ, then the speed of the spot on the workpiece would increase for higher angles, and therefore, the energy deposited in the material would decrease, possibly resulting in inhomogeneous application performance. Since the F-Theta objective translates the constant angular velocity of the polygon to a constant velocity of the spot on the workpiece, this problem disappears. F-Theta lenses can be used for high speed processing with very reliable quality. This allows for most efficient laser material processing.
Focal length
Scan angle
In theoretical nomenclature, the focal length is the distance from the second cardinal The max full diagonal scan angle corresponds to the scan field diagonal, i.e. using the objective with angles above this maximum angle will lead to clipping of the beam.
Application relevance
From the F-Theta relation one sees that an increase of the field size can also be achieved by using bigger scan angles. This would have the advantage that the beam size would stay the same. However, big scan angles pose a considerable complication for the design of cost effective F-Theta lenses.
Input beam diameter
To control stray light, and also reduce the required size of optical elements in laser material processing applications, the incoming Gaussian laser beam will usually be clipped at the diameter where the intensity has fallen to 1/e² of the maximum value. The lenses are designed such that those beams will pass through the objective without being clipped anywhere.
Application relevance
The input beam diameter immediately affects the spot size via the spot size relation antiproportionally and consequently intensity distribution in processing area. Bigger beam diameters result in smaller spot sizes and vice versa. Using beams with diameters above the maximum allowed beam size will lead to clipping of the beam at the edges of the field. This effects non ideal intensity distribution and leads to lower processing quality (see beam-clipping).
Focus size
When focusing light, the spot size σ can not surpass the limit of diffraction, i.e. the spot size does not depend on the aberrations of the lens anymore but only on the physical properties wavelength λ, the input beam diameter Ø, and the focal length f. As for the laser input beam diameter, it is common to define the focus size as the diameter at which the intensity is dropped to 1/e² of the maximum intensity at the spot center. For input beams defined as in "input beam diameter," the focus size is given as σ = 1.83 λ f / Ø.
Application relevance
Decreasing the focus size immediately decreases e.g. the structure sizes of the patterns written. It also increases the maximum intensity in the center of the spot, therefore lifting it above the application threshold of a particular material. If, however, the intensity is way above the application threshold, the energy not needed for the application processed is deposited in the material leading to varying non-controllable side effects, possibly reducing the application performance. Therefore, the user has to find the optimal focus size for the application under question.
Beam-clipping
If the beam diameter of the incoming laser beam is too big or the scan angle is above the maximum allowed angle, parts of the laser beam might hit mechanical parts when passing through the objective. This is referred to as clipping of the laser beam.
Application relevance
A laser beam being clipped inside the objective will generate unwanted stray light and might also heat up the objective leading to thermal focus shift and even destruction of the lens. All JENar™ Standard and Silverline™ lenses are designed to show no beam clipping when used with the scanner setup described on the datasheets.
Back working distance
Whereas the focal length is a rather theoretical construct, the back working distance describes the real distance between the end of the objective (the edge closest to the workpiece) and the workpiece.
Application relevance
The back working distance describes how much free space there is between workpiece and lens. Since focal length and back working distance are closely related, the need for a bigger free space between workpiece and objective usually results in the requirement of using lenses with bigger focal lengths.
Scan field
Telecentricity
Scanner geometry
Damage threshold LIDT
Back reflection
Thermal focus shift
SilverlineTM
Pulse stretching GDD
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